Titlebook: Helium Ion Microscopy; Principles and Appli David C. Joy Book 2013 The Editor(s) (if applicable) and The Author(s), under exclusive license

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Microscopy with Ions: A Brief History,e illumination provided will determine, and ultimately limit, the performance of the instrument. Each type of microscope will have its own type of illuminating source. For a high-performance scanning electron or ion microscope, the most desirable property of the beam source is that the source must have a high brightness.

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