Titlebook: Helium Ion Microscopy; Principles and Appli David C. Joy Book 2013 The Editor(s) (if applicable) and The Author(s), under exclusive license

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Prosaic

TRAWL

Book 2013of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microsc

myalgia

2192-1091 ing beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron be

GULLY

低位的人或事

tolerance

,Ion–Solid Interactions and Image Formation,information may be obtained from each, and how the signal yields and spatial resolution can be optimized in each case. Images whose origins are neither known nor understood can never be any more than just a pretty picture.

stress-response

Microanalysis with HIM,itivity together with high spatial resolution for elements across the entire periodic table. This technique would therefore also be the automatic first choice for microanalysis when using ion beams if it were a viable option.

AMPLE

Working with Other Ion beams, Ideally, the same source could rapidly be reconfigured to select and generate any one of a number of different ion beams. Because each type of ion has its own strengths and weaknesses, this feature would add substantially to the utility of the ion microscope.

COM

Patterning and Nanofabrication, prior to examination in a transmission electron microscope is well known and in widespread use. As noted earlier, less known is the fact that light ions such as He. can also remove material from a surface, although at a much reduced rate, providing a method to shape, mark, and pattern materials on nanoscale.