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Titlebook: Helium Ion Microscopy; Principles and Appli David C. Joy Book 2013 The Editor(s) (if applicable) and The Author(s), under exclusive license

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發(fā)表于 2025-3-21 18:36:42 | 只看該作者 |倒序?yàn)g覽 |閱讀模式
書(shū)目名稱(chēng)Helium Ion Microscopy
副標(biāo)題Principles and Appli
編輯David C. Joy
視頻videohttp://file.papertrans.cn/426/425515/425515.mp4
叢書(shū)名稱(chēng)SpringerBriefs in Materials
圖書(shū)封面Titlebook: Helium Ion Microscopy; Principles and Appli David C. Joy Book 2013 The Editor(s) (if applicable) and The Author(s), under exclusive license
描述.Helium Ion Microscopy: Principles and Applications. describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise performance. The physical principles of Ion-Induced Secondary Electron (iSE) generation by ions are discussed, and an extensive database of iSE yields for many elements and compounds as a function of incident ion species and its energy is included. Beam damage and charging are frequently outcomes of ion beam irradiation, and techniques to minimize such problems are presented. In addition to imaging, ions beams can be used for the controlled deposition, or removal, of selected materials with nanometer precision. The techniques and conditions required for nanofabrication are discussed and demonstrated. Finally, the problem of performing chemical microanalysis with ion
出版日期Book 2013
關(guān)鍵詞Backscattered ion imaging; Detecting ion beam signals; HIM; HIM charging and damage; HIM with a GFIS; HIM
版次1
doihttps://doi.org/10.1007/978-1-4614-8660-2
isbn_softcover978-1-4614-8659-6
isbn_ebook978-1-4614-8660-2Series ISSN 2192-1091 Series E-ISSN 2192-1105
issn_series 2192-1091
copyrightThe Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Science+Busines
The information of publication is updating

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Book 2013of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microsc
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2192-1091 ing beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron be
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,Ion–Solid Interactions and Image Formation,information may be obtained from each, and how the signal yields and spatial resolution can be optimized in each case. Images whose origins are neither known nor understood can never be any more than just a pretty picture.
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Microanalysis with HIM,itivity together with high spatial resolution for elements across the entire periodic table. This technique would therefore also be the automatic first choice for microanalysis when using ion beams if it were a viable option.
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Working with Other Ion beams, Ideally, the same source could rapidly be reconfigured to select and generate any one of a number of different ion beams. Because each type of ion has its own strengths and weaknesses, this feature would add substantially to the utility of the ion microscope.
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Patterning and Nanofabrication, prior to examination in a transmission electron microscope is well known and in widespread use. As noted earlier, less known is the fact that light ions such as He. can also remove material from a surface, although at a much reduced rate, providing a method to shape, mark, and pattern materials on nanoscale.
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