Titlebook: Microelectronics Manufacturing Diagnostics Handbook; Abraham H. Landzberg Book 1993 Springer Science+Business Media New York 1993 diagnosi

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Traceability,pter will discuss systems to assure traceability of microelectronic components from raw materials, through manufacturing and component subassembly and into an end product. The use of these systems for yield and quality learning, as well as prevention, will also be discussed.

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echniques, test, diagnostics, and fail- ure analysis. It discusses methods for modeling conductors for powerful desktop computers to their use in maintaining optimum engine per- and reducing defects, and for preventing de- formance in modem automobiles, they have fects in the first place. The approa

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Product Dimensional Metrology and Pattern Defect Inspection,roblems, (3) implement corrective strategies traceable to problem sources, and (4) monitor and control process and tool critical parameters within upper and lower control limits from a mean target. Moreover, metrology and inspection functions are also important for determining process stability and establishing control baselines.

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Contamination Monitoring,nted out by many authors, including Burnett (1985) and Faure and Thebault (1987). A particularly detailed article on contamination levels in various semiconductor manufacturing operations was published by Osburn et al. (1988). For more detail on contamination control, see also the books by Tolliver (1988) and Donovan (1990).

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Modeling for Manufacturing Diagnostics,interpretation, one might reach a conclusion, appropriately modify the theory and iterate, or conduct more experiments to confirm results. On the other hand, without an appropriate theory, one is reduced to “educated” guesswork in these aspects of diagnostics.

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Failure Analysis of Semiconductor Devices,eliability) can also be improved by performing analysis on returned failed parts. Results from both analyses are continuously fed back to manufacturing and engineering for improved product quality and reliability.

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Book 1993rt. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func- Analysis your application. tion improvements in yield an

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s of the art. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func- Analysis your application. tion improvements in yield an978-1-4613-5840-4978-1-4615-2029-0