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Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu

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發(fā)表于 2025-3-21 19:51:27 | 只看該作者 |倒序?yàn)g覽 |閱讀模式
書目名稱Laser Heat-Mode Lithography
副標(biāo)題Principle and Method
編輯Jingsong Wei
視頻videohttp://file.papertrans.cn/582/581509/581509.mp4
概述Systematically describes laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer.
叢書名稱Springer Series in Materials Science
圖書封面Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu
描述.This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance
出版日期Book 2019
關(guān)鍵詞Phase change; Thermal diffusion; Arbitrary pattern writing; Metallo-organic compound; Maskless lithograp
版次1
doihttps://doi.org/10.1007/978-981-15-0943-8
isbn_softcover978-981-15-0945-2
isbn_ebook978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812
issn_series 0933-033X
copyrightSpringer Nature Singapore Pte Ltd. 2019
The information of publication is updating

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發(fā)表于 2025-3-21 23:09:51 | 只看該作者
0933-033X yscale lithography, resist thin films, and pattern transfer..This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, whi
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Laser Heat-Mode Lithography on Transparent Thin Films,irectly fabricate the micro/nano-structures through traditional laser writing lithography because the laser energy cannot be absorbed due to the very low absorption coefficient of transparent thin films in writing laser wavelength.
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發(fā)表于 2025-3-22 11:54:42 | 只看該作者
Laser Heat-Mode Grayscale Lithography,uctural change occurs when the temperature exceedscertain threshold. In this process, the interaction between laser and materials usually involves structural changes, such as crystallization, oxidization, melting, and solidification.
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0933-033X t size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance978-981-15-0945-2978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812
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