Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu

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書目名稱Laser Heat-Mode Lithography影響因子(影響力)




書目名稱Laser Heat-Mode Lithography影響因子(影響力)學科排名




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書目名稱Laser Heat-Mode Lithography網(wǎng)絡(luò)公開度學科排名




書目名稱Laser Heat-Mode Lithography被引頻次




書目名稱Laser Heat-Mode Lithography被引頻次學科排名




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書目名稱Laser Heat-Mode Lithography年度引用學科排名




書目名稱Laser Heat-Mode Lithography讀者反饋




書目名稱Laser Heat-Mode Lithography讀者反饋學科排名

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0933-033X yscale lithography, resist thin films, and pattern transfer..This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, whi

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Laser Heat-Mode Lithography on Transparent Thin Films,irectly fabricate the micro/nano-structures through traditional laser writing lithography because the laser energy cannot be absorbed due to the very low absorption coefficient of transparent thin films in writing laser wavelength.

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Laser Heat-Mode Grayscale Lithography,uctural change occurs when the temperature exceedscertain threshold. In this process, the interaction between laser and materials usually involves structural changes, such as crystallization, oxidization, melting, and solidification.

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0933-033X t size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance978-981-15-0945-2978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812

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