| 書目名稱 | Shape and Functional Elements of the Bulk Silicon Microtechnique |
| 副標題 | A Manual of Wet-Etch |
| 編輯 | Joachim Frühauf |
| 視頻video | http://file.papertrans.cn/867/866375/866375.mp4 |
| 概述 | Systematic manual of bulk silicon microtechniques.Includes supplementary material: |
| 圖書封面 |  |
| 描述 | .This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications. . |
| 出版日期 | Book 2005 |
| 關鍵詞 | Design of etch masks and processes; Microfluidics; Micromechanics; Microoptics; Microtechnologies; Sensor |
| 版次 | 1 |
| doi | https://doi.org/10.1007/b138230 |
| isbn_softcover | 978-3-642-06048-9 |
| isbn_ebook | 978-3-540-26876-5 |
| copyright | Springer-Verlag Berlin Heidelberg 2005 |
|Archiver|手機版|小黑屋|
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