Titlebook: Scanning Electron Microscopy and X-Ray Microanalysis; Joseph I. Goldstein,Dale E. Newbury,David C. Joy Textbook 2018Latest edition Springe

NAV

,Electron Beam—Specimen Interactions: Interaction Volume,m that reaches the specimen surface: energy (typically selected in the range 0.1–30 keV), diameter (0.5 nm to 1 μm or larger), beam current (1 pA to 1 μA), and convergence angle (semi-cone angle 0.001–0.05 rad). In a conventional high vacuum SEM (typically with the column and specimen chamber pressu

SPURN

Expressly

Secondary Electrons,r covalently bonded materials) or conduction band electrons (in the case of metals), which have binding energies of ~ 1–15 eV to the parent atom(s). Secondary electrons are quantified by the parameter ., which is the ratio of secondary electrons . from the specimen, ., to the number of incident beam

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X-Rays, each atom species. The critical condition for generating characteristic X-rays is that the energy of the beam electron must exceed the electron binding energy, the critical ionization energy .., for the particular atom species and the K-, L-, M-, and/or N- atomic shell(s). For efficient excitation,

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