| 書目名稱 | Photomodulated Optical Reflectance |
| 副標(biāo)題 | A Fundamental Study |
| 編輯 | Janusz Bogdanowicz |
| 視頻video | http://file.papertrans.cn/747/746552/746552.mp4 |
| 概述 | Selected as an outstanding contribution by K.U. Leuven.Reports significant advances in non-destructive testing of semiconductors.New approaches have potential for industrial application.Includes suppl |
| 叢書名稱 | Springer Theses |
| 圖書封面 |  |
| 描述 | One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation. |
| 出版日期 | Book 2012 |
| 關(guān)鍵詞 | Dopant and Carrier Profiling; Electrooptical and Electrothermal Effects; Non-destructive Semiconductor |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-642-30108-7 |
| isbn_softcover | 978-3-642-42686-5 |
| isbn_ebook | 978-3-642-30108-7Series ISSN 2190-5053 Series E-ISSN 2190-5061 |
| issn_series | 2190-5053 |
| copyright | Springer-Verlag Berlin Heidelberg 2012 |
|Archiver|手機(jī)版|小黑屋|
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