| 書目名稱 | Outlook and Challenges of Nano Devices, Sensors, and MEMS | | 編輯 | Ting Li,Ziv‘Liu | | 視頻video | http://file.papertrans.cn/706/705137/705137.mp4 | | 概述 | Explains the interaction of nanascale structures and electrical and/or optical behavior of novel semiconductor devices, MEMS, and sensors.Describes processes and materials needed to fabricate the nano | | 圖書封面 |  | | 描述 | .This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.. | | 出版日期 | Book 2017 | | 關(guān)鍵詞 | FinFET devices; Nanoscale MEMS; Nanoscale MOS devices; Nanoscale semiconductor devices; Nanoscale sensor | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-319-50824-5 | | isbn_softcover | 978-3-319-84500-5 | | isbn_ebook | 978-3-319-50824-5 | | copyright | Springer International Publishing AG 2017 |
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