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Titlebook: Optical Characterization of Epitaxial Semiconductor Layers; Günther Bauer,Wolfgang Richter Book 1996 Springer-Verlag Berlin Heidelberg 199

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書(shū)目名稱Optical Characterization of Epitaxial Semiconductor Layers
編輯Günther Bauer,Wolfgang Richter
視頻videohttp://file.papertrans.cn/703/702517/702517.mp4
圖書(shū)封面Titlebook: Optical Characterization of Epitaxial Semiconductor Layers;  Günther Bauer,Wolfgang Richter Book 1996 Springer-Verlag Berlin Heidelberg 199
描述The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter- action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor
出版日期Book 1996
關(guān)鍵詞diffraction; ellipsometry; scattering; semiconductor; spectroscopy
版次1
doihttps://doi.org/10.1007/978-3-642-79678-4
isbn_softcover978-3-642-79680-7
isbn_ebook978-3-642-79678-4
copyrightSpringer-Verlag Berlin Heidelberg 1996
The information of publication is updating

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Introduction,islocations are generated which relieve the strain. For a lattice mismatch, (α. ? α.)/α., of 1 percent typical values for the critical thickness are 10nm (for Si...Ge. on Si). In Fig. 1.1 the lattice constants of all relevant semiconductors, namely group IV elements, III–V, II–VI and IV–VI compounds
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of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor978-3-642-79680-7978-3-642-79678-4
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High Resolution X-Ray Diffraction,Conventional high resolution X-Ray diffraction has been developed into a powerful tool for the nondestructive . investigation of epitaxial layers, of heterostructures and superlattice systems:
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https://doi.org/10.1007/978-3-642-79678-4diffraction; ellipsometry; scattering; semiconductor; spectroscopy
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Analysis of Epitaxial Growth,lines. With the advent of epitaxial layer growth by Molecular Beam Epitaxy (MBE), Vapour Phase Epitaxy (VPE) and Liquid Phase Epitaxy (LPE) the two areas moved closer together since microscopic knowledge about the growth process turned out to be necessary in order to understand and to control the growth in a reproducible manner.
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