Titlebook: Next-Generation Actuators Leading Breakthroughs; Toshiro Higuchi,Koichi Suzumori,Satoshi Tadokoro Book 2010 Springer-Verlag London 2010 In

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AZARASHI (Seal) Mechanism for Meso/Micro/Nano Manipulators in the drive by the current pulse were much smaller than those by a voltage linear amplifier. It was applied to the driving method of Extension device of a 1-DOF device with nanometeraccuracy. An application to a positioning stage of a manipulator is introduced.

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New Microactuators Using Functional Fluidsluids. Then, as some results of our research, ECF micromotors, ECF gyroscopes, soft actuators using pressure due to ECF jet, forced liquid cooling systems using ECF jet, microactuators using ERF/MRF, and high output power piezoelectric micropumps are described briefly.

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