| 書目名稱 | Micro-Nanofabrication | | 副標(biāo)題 | Technologies and App | | 編輯 | Zheng Cui | | 視頻video | http://file.papertrans.cn/643/642315/642315.mp4 | | 概述 | Reflects the author‘s long experience in the field as well as the latest developments.Introduces and compares techniques for both, VLSI and MEMS fabrication.Extensive literature references to each cha | | 圖書封面 |  | | 描述 | .The book is a collection of the author’s years of experience and research findings, as well as the latest development, in micro-nanofabrication technologies. It gives a detailed introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. For each of the fabrication technology it introduces, the emphasis is on clear explanation of the basic principle, the essential steps in the processes, various process conditions and typical process parameters. The advantages and disadvantages of each technique are also analysed. The applications of micro-nanofabrication technologies focus on manufacturing of very large scale integrated circuits (VLSI), nanoelectronics, optoelectronics, high density magnetic storage, micro-electro-mechanical system or MEMS, biochip or lab-on-chip and nanotechnology. Each of the applications is accompanied by practical examples to demonstrate how particular fabrication techniques are applied. There is an extensive list of references following each chapter for readers to explore further. The book is not only a good supplement | | 出版日期 | Book Mar 2006Latest edition | | 關(guān)鍵詞 | mst07 | | 版次 | 1 | | doi | https://doi.org/10.1007/3-540-33779-2 | | copyright | Springer-Verlag Berlin Heidelberg 2005 |
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