Titlebook: Microsystems Mechanical Design; Francesco Bona,Eniko T. Enikov Book 2006 CISM Udine 2006 Nanotechnologie.behavior.design.dynamics.engineer

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Introduction to Micro-Systems and to the Techniques for Their Fabrication,stems, their main manufacturing techniques are reviewed. These include substrate preparation, photolithography, oxidation and diffusion, thin-film deposition, and wet and dry etching techniques. MEMS-specific processes including bulk- and surface-micromachining, LIGA, soft-lithography, and anodic bo

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Microstructures Under Electrostatic Loads: Discrete System Modelling,ion is used very often for microsystems. The evaluation of the mechanical behavior of microstructures under electrostatic forces requires a new approach based on a so-called coupled field analysis; in fact, due to electrostatic forces structure exhibits a deformation that generally influences the el

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Dynamics of Mechatronic Systems at Microscale,nonlinearities and microscale. This lecture is aimed to introduce basic methods for mechanical design of microelectromechanical systems (MEMs), by means of a test case consisting of an electrostatic microactuator, with few degrees of freedom. A model of the whole microsystem is built, by following a

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Continuum Microstructures Loaded Electrostatically,ical coupling, due to the mutual interaction between the electrostatic field and the deflection of the structure. A common case, frequently analyzed in the literature, is that of cantilever beam loaded electrostatically; in this case different analytical approaches based on a strong simplification o

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Design of Compliant Micromechanisms,gn of devices based on leaf springs, flexural notches and continuum structures with distributed compliance are given, and a critical presentation of the peculiarities of these solutions is provided. The extensive bibliographical list is given as means to extend further the study to details of each o

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Microfluidics: Device Science and Technology,n and particular laws, three size effects are introduced. The velocity slip boundary condition for gas flows as well as the electrokinetic and polar-mechanics effects for liquid flow in microdomains are introduced. Pressure-driven gas flows and electrokinetically-driven liquid flows in microchannels

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