Titlebook: Microsystem Design; Stephen D. Senturia Textbook 2001 Springer Science+Business Media New York 2001 Sensor.Software.Transducer.electronics

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nized and applied under capitalism. Thus, rather than viewing labour in an essentialist fashion — common to and independent of all modes of production — I view it as a product of a specific social formation, one in which labour is abstracted from the complex network of social, cultural, political, a

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nized and applied under capitalism. Thus, rather than viewing labour in an essentialist fashion — common to and independent of all modes of production — I view it as a product of a specific social formation, one in which labour is abstracted from the complex network of social, cultural, political, a

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ing labour, as exchange is a social process in its own right. In section (iii) I explore an alternative account of exchange, which seeks neither to reduce it to the subjectivity of labour (. Marx) nor to the subjectivity of consumers (. neoclassical economics), but rather views exchange as an . proc

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Textbook 2001ed sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an elect

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978-1-4757-7458-0Springer Science+Business Media New York 2001

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Microfabricationny of the steps used in modem MEMS device process sequences and permits discussion of some of the trade-offs between process and device performance that will arise throughout the rest of this book. In the following chapter, we discuss how combinations of these process steps are combined to make complete process flows.

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