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Titlebook: Micromachined Ultrasound-Based Proximity Sensors; Mark R. Hornung,Oliver Brand Book 1999 Springer Science+Business Media New York 1999 Sen

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發(fā)表于 2025-3-21 16:53:58 | 只看該作者 |倒序瀏覽 |閱讀模式
書目名稱Micromachined Ultrasound-Based Proximity Sensors
編輯Mark R. Hornung,Oliver Brand
視頻videohttp://file.papertrans.cn/634/633310/633310.mp4
叢書名稱Microsystems
圖書封面Titlebook: Micromachined Ultrasound-Based Proximity Sensors;  Mark R. Hornung,Oliver Brand Book 1999 Springer Science+Business Media New York 1999 Sen
描述.Micromachined Ultrasound-Based Proximity Sensors. presentsa packaged ultrasound microsystem for object detection and distancemetering based on micromachined silicon transducer elements. Itdescribes the characterization, optimization and the long-termstability of silicon membrane resonators as well as appropriatepackaging for ultrasound microsystems. ..Micromachined Ultrasound-Based Proximity Sensors. describes acost-effective approach to the realization of a micro electromechanical system (MEMS). The micromachined silicon transducerelements were fabricated using industrial IC technology combined withstandard silicon micromachining techniques. Additionally, thisapproach allows the cointegration of the driving and read-outcircuitry. To ensure the industrial applicability of the fabricatedtransducer elements intensive long-term stability and reliabilitytests were performed under various environmental conditions such ashigh temperature and humidity. .Great effort was undertaken to investigate the packaging and housingof the ultrasound system, which mainly determine the success orfailure of an industrial microsystem. A low-stress mounting of thetransducer element minimizes thermomechan
出版日期Book 1999
關(guān)鍵詞Sensor; Standard; Transducer; development; integrated circuit; microelectromechanical system (MEMS); micro
版次1
doihttps://doi.org/10.1007/978-1-4615-4997-0
isbn_softcover978-1-4613-7269-1
isbn_ebook978-1-4615-4997-0Series ISSN 1389-2134
issn_series 1389-2134
copyrightSpringer Science+Business Media New York 1999
The information of publication is updating

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Design Considerations For Silicon Resonators, but also the complete system of resonator and housing. To do this, a basic understanding of the system behavior is indispensable. The following Chapter summarizes basic design considerations for the proximity sensor microsystem. The first Section gives a short overview of the basic behavior of a re
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Resonator Characterization,embranes are investigated. This includes the dependence of resonance frequency, vibration amplitude, mode shape, and static bending of the membrane on the membrane geometry. Since the resonators are employed as a transducer element in an ultrasound sensor, the sound pressure generated by the vibrati
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Proximity Sensor,f the echo reflected by an object [79]. Existing ultrasound sensors typically use a single piezoelectric or electrostatic transducer element both for generation as well as detection of ultrasound pulses. The time of flight of an ultrasound pulse is determined by the distance to the object and the so
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Mark R. Hornung,Oliver Brandr Pandemie verbundenen Einschr?nkungen führten zu einem beispiellosen Einbruch des Tourismus, zu Ver?nderungen des Reiseverhaltens und zur Umlenkung von Reisestr?men. In Deutschland lie? sich beispielsweise eine Hinwendung zu Inlandsreisezielen und zu Tagesreisen im n?heren Wohnumfeld sowie eine Ste
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Mark R. Hornung,Oliver Brandr Pandemie verbundenen Einschr?nkungen führten zu einem beispiellosen Einbruch des Tourismus, zu Ver?nderungen des Reiseverhaltens und zur Umlenkung von Reisestr?men. In Deutschland lie? sich beispielsweise eine Hinwendung zu Inlandsreisezielen und zu Tagesreisen im n?heren Wohnumfeld sowie eine Ste
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