Titlebook: Micromachined Mirrors; Robert Conant Book 2003 Springer Science+Business Media New York 2003 consumption.design.microelectromechanical sys

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Example Application of Scanning Mirrors,Micromachining technology can enable a new generation of portable projection-video displays that are lower in weight, power consumption, and cost than displays that are available today. Emerging micromachined projection video display technologies fall into three general categories:

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Surface-Micromachined Mirrors,e free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson [31], and the foundations for the polysilicon surface-micromachining process were laid by Muller and Howe in 1982 [32]. Steps in the fabrication process include, but are not limited to:

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Introduction,ions, information display, and metrology. The advances in optical science at the beginning of the 20. century laid the foundation for the understanding of optical particle and wave properties, and in the 1950’s the invention of the laser allowed, for the first time, practical commercial and industri

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Scanning Mirrors,statically. Resonant scanning — moving the mirror sinusoidally at its resonant frequency — is useful in such applications as line-scanning for barcode readers, raster-scanned video displays, and laser printers. Steady-state beam steering — moving the mirror from one static position to another — is u

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Surface-Micromachined Mirrors,e free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson [31], and the foundations for the polysilicon surface-micromachining process were laid by Muller and Howe in 1982 [32]. Steps in the fabrication process include, but are not limited to:

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Staggered Torsional Electrostatic Combdrive (STEC) Micromirror, the Bosch process (65]. This process enables etching of trenches in silicon with aspect ratios up to 100:1. This deep-trench-etching process provides a hybrid between surface micromachining, as described in Chapter 3, and traditional bulk micromachining, where wet chemical etching is used to make s

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Conclusions,on, and reliability. These mirrors can offer significant advantages over macro-scale mirrors, but the fundamental limitations of scanning mirrors have not been widely discussed. In this dissertation we have derived the range of performance, in terms of resonant frequency and optical resolution, that

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Robert Conant Ph.D.roadmap framework and recommendations for urban development enabled by efficient web geoinformation utilities for an integrated sustainability and public health protection at smart cities. The roadmap framework aims to support the innovation policies and sustainable development strategies of cities

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