Titlebook: Micro and Nano Fabrication Technology; Jiwang Yan Living reference work 20200th edition Micro and Nano Fabrication Technology.Nano medici

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Electron-Beam Machining,anometers. This property permits the fabrication of nanoscale patterns by using an EB-sensitive polymer (resist) in a process called EB lithography (EBL). EBL is an advanced technique that can be used to produce three-dimensional structures by changing the EB dose or varying the EB acceleration volt

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Elliptical Vibration Cutting for Difficult-to-Cut Materials,to the tool together with the cutting motion so that the cutting process becomes intermittent, and the tool can pull up the chip. This unique cutting process leads to many superior machining performances such as low cutting force, high machining accuracy, and long tool life compared to conventional

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Fabrication of Metallic Nanodot Arrays,evices. In this section, simple and efficient manufacturing processes are introduced for metal nanodot arrays. These processes are based on the combination of thin metal film coatings deposited on substrates and thermal dewetting. The first process discussed herein is a conventional thermal dewettin

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Ion Beam Machining, irradiated ions with a target material. The interaction causes a sputtering phenomenon, which can be utilized for micro- and nanomachining. The interaction simultaneously causes damage to the machined area, which degrades the characteristics of the machined material. However, the damaged layer can

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