| 書目名稱 | Micro System Technologies 90 | | 副標(biāo)題 | 1st International Co | | 編輯 | Herbert Reichl | | 視頻video | http://file.papertrans.cn/633/632715/632715.mp4 | | 圖書封面 |  | | 描述 | On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions f | | 出版日期 | Conference proceedings 1990 | | 關(guān)鍵詞 | Sensor; Technologie; complexity; computer-aided design (CAD); design; development; electronics; integrated | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-642-45678-7 | | isbn_softcover | 978-3-642-45680-0 | | isbn_ebook | 978-3-642-45678-7 | | copyright | Springer-Verlag Berlin Heidelberg 1990 |
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