Titlebook: Micro Electro Mechanical Systems; Qing-An Huang Living reference work 20200th edition Micro fluid.RF MEMS.actuators.bio MEMS.sensors

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Electrodes for Nerve Recording and Stimulation,nd next-generation electrode-tissue interface modifications facilitated electrode . and implantation ...The goal of this chapter is to provide the reader a broader overview of flexible MEMS technologies that can be applied together to solve problems in neural interface.

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MEMS Actuators Driven by Lorentz Force,c field and the driving current, which results in an easy control of the lateral displacement by the driving current. The simple structure and fabrication process of the actuator lead to a high fabrication yield and good stability.