Titlebook: Micro Electro Mechanical Systems; Qing-An Huang Reference work 2018 Springer Nature Singapore Pte Ltd. 2018 Micro fluid.RF MEMS.actuators.

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Integrated Vacuum Microsensor Systems in CMOS Technologye the vacuum sensor system with sensor and its control system monolithically, which is convenient for applications. The integrated vacuum sensor system has the advantages of small size, volume, and weight, which would have its potential applications, such as the space exploration, micro-packaging, etc.

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A Double Differential Torsional MEMS Accelerometer with Improved Temperature Robustness common V-shaped torsional beam which mainly aims to improve the temperature robustness and long-term performance of the torsional accelerometer. This chapter supplies a new method for the accelerometer performances improvement and this method can also be used in the design of other sensors.

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Yan Xingd ?kologie zu schaffen. Gewi? ist der Freizeitsektor mit über vier Millionen Besch?ftigten ein bedeutender Wirtschaftsfaktor in Deutschland, dadurch darf jedoch das Problembewu?tsein nicht verdr?ngt werden. Neues Denken im Tourismus, die Form des . hat daher Einzug gehalten in die Strategien der Rei