| 書目名稱 | Mechanical Microsensors | | 編輯 | Miko Elwenspoek,Remco Wiegerink | | 視頻video | http://file.papertrans.cn/629/628315/628315.mp4 | | 概述 | Gives an overview of the physics necessary to understand, design and fabricate mechanical microsensors.Provides a guide to the relevant literature.Discusses the advantages and limitations of microtech | | 叢書名稱 | Microtechnology and MEMS | | 圖書封面 |  | | 描述 | This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit- zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me- chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa- tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi- rd th neering students in their 3 or 4 year should have | | 出版日期 | Book 2001 | | 關(guān)鍵詞 | Gauge; Sensor; deformation; design; friction; heat transfer; mechanical engineering; mechanics; mechanism; mi | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-662-04321-9 | | isbn_softcover | 978-3-642-08706-6 | | isbn_ebook | 978-3-662-04321-9Series ISSN 1615-8326 Series E-ISSN 2365-0680 | | issn_series | 1615-8326 | | copyright | Springer-Verlag Berlin Heidelberg 2001 |
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