| 書目名稱 | MEMS Vibratory Gyroscopes | | 副標題 | Structural Approache | | 編輯 | Cenk Acar,Andrei‘Shkel | | 視頻video | http://file.papertrans.cn/621/620117/620117.mp4 | | 概述 | Provides a unique balance between theory and practical design issues.Presents comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sens | | 叢書名稱 | MEMS Reference Shelf | | 圖書封面 |  | | 描述 | .MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.. | | 出版日期 | Book 2009 | | 關(guān)鍵詞 | DOF design concept; MEMS accelerometers; MEMS material properties; MEMS vibratory gyroscopes; architectu | | 版次 | 1 | | doi | https://doi.org/10.1007/978-0-387-09536-3 | | isbn_softcover | 978-1-4419-3489-5 | | isbn_ebook | 978-0-387-09536-3Series ISSN 1936-4407 Series E-ISSN 1936-4415 | | issn_series | 1936-4407 | | copyright | Springer-Verlag US 2009 |
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