Titlebook: MEMS Reliability; Allyson L. Hartzell,Mark G. da Silva,Herbert R. Sh Book 2011 Springer Science + Business Media, LLC 2011 MEMS.MEMS relia

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Failure Modes and Mechanisms: Failure Modes and Mechanisms in MEMS, to reduce or mitigate their effect. A . describes the way in which a product or process could potentially fail to perform its desired function and can be defined in several ways, of which the most common is in a progression of time, where a failure mode comes between a . and an .. However, it is al

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In-Use Failures,d manufacturing perspective. In this chapter we focus on how a well-designed, fabricated and packaged device can fail in use. There is a tight link between the design, manufacturing and in-use failures. Understanding the physics of failure (e.g., creep, fatigue) and the properties of materials used

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Root Cause and Failure Analysis,nclude strategies for identifying potential failure modes, failure mechanisms, risk areas in design and process, and containment strategies. Containment of the failure is crucial to achieving a low field failure rate while the root cause is determined and the proper corrective action is developed, c

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Testing and Standards for Qualification,s in the MEMS world; this is a very versatile field with little boundaries and new products developing daily (bioMEMS from polymers, inertial MEMS, powerMEMS, optical MEMS, RF MEMS, etc.). Thus, testing each MEMS product type and design can require unique instruments that are often custom designed.

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