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uators, and microfluidics, and their relationship with MEMS..Introductory MEMS: Fabrication and Applications. is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS

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Christoph Gabrieluators, and microfluidics, and their relationship with MEMS..Introductory MEMS: Fabrication and Applications. is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS

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