Titlebook: Introduction to Microsystem Design; Werner Karl Schomburg Book 2015Latest edition Springer-Verlag Berlin Heidelberg 2015 Deflections of mi

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Microgram

Membranes,membranes are described in detail by mathematical models of different complexity and accuracy. A table summarizes the equations for quick reference. The effects of tensile and compressive stress, membranes with corrugations and a boss in their center are included as well as the burst pressure of mem

實施生效

Beams,s, for example in acceleration sensors. Deflection and shape of beams subject to outer forces are described by equations including the effects of the kind of fixation, tensile or com-pressive stress and arrangement. A table summarizes the most important equations for quick reference.

DUST

Vibrations,g moments, and the effects of additive mass and sound emission into a surrounding medium are included where possible. It is also discussed how vibrations can be measured with strain gauges for sensor applications. A table with the most important equations allows quick reference.

muster

陰險

Capacitive Forces,lectric electrodes) are presented and equations are shown in a table enabling the calculation of these forces. Another table provides the output voltages of voltage dividers and bridge circuits containing capacities with a moving electrode.

incontinence

Piezoelectric Effect,resented. Different arrangements of piezoelectric and carrier layers are described and it is shown how the dimensions of such arrangements are optimized to obtain maximum deflection, force and energy efficiency. In a table, the equations for calculating the characteristic curves of arrangements with

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installment

Micro Valves,uator. Valve types are compared with respect to achievable flow and maximum pressure difference. Several alternatives of micro valves and their specific properties are introduced. The influence of the dead volume on the switching time of valves and the flow characteristic of passive valves are calcu