Titlebook: Dynamic Behavior of Materials, Volume 1; Proceedings of the 2 Bo Song,Dan Casem,Jamie Kimberley Conference proceedings 2014 The Society for

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Failure Analysis of Micron Scaled Silicon Under High Rate Tensile Loading,onsequently, MEMS devices suffer from inconsistent performance and insufficient reliability. This research aims to understanding the failure mechanisms in micro-scaled specimens deforming at high rates. Single crystal silicon micro beams that are 4 μm thick are subjected to tensile loading at averag

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