| 書目名稱 | Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| 編輯 | Christopher Taudt |
| 視頻video | http://file.papertrans.cn/270/269900/269900.mp4 |
| 概述 | current challenges in surface metrology with a single, new interferometric approach.A novel metrology to enhance current high-precision surface manufacturing technologies.This is an Open Access-book |
| 圖書封面 |  |
| 描述 | This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 μm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10.-5.. This was achieved by the developmentof a novel mathematical analysis approach.. |
| 出版日期 | Book‘‘‘‘‘‘‘‘ 2022 |
| 關(guān)鍵詞 | surface metrology; profilometry; interferometry; low-coherence interferometry; semiconductor manufacturi |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-658-35926-3 |
| isbn_softcover | 978-3-658-35925-6 |
| isbn_ebook | 978-3-658-35926-3 |
| copyright | The Editor(s) (if applicable) and The Author(s) 2022 |
|Archiver|手機版|小黑屋|
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