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Titlebook: Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester; Shanky Saxena,Ritu Sharma,B. D. Pant Book 2021 The E

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發(fā)表于 2025-3-21 19:57:53 | 只看該作者 |倒序?yàn)g覽 |閱讀模式
書目名稱Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester
編輯Shanky Saxena,Ritu Sharma,B. D. Pant
視頻videohttp://file.papertrans.cn/269/268551/268551.mp4
概述Serves as a complete guide from design, FEM, and fabrication to characterization.Presents basic insights into the mask design and fabrication details.Includes 101 colored images to understand key tech
叢書名稱Energy Systems in Electrical Engineering
圖書封面Titlebook: Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester;  Shanky Saxena,Ritu Sharma,B. D. Pant Book 2021 The E
描述.This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures – single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic,?and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process..
出版日期Book 2021
關(guān)鍵詞Piezoelectric Energy Harvesters; Cantilever Beam; MEMS Device; Microelectronics; Piezoelectric Sensors; E
版次1
doihttps://doi.org/10.1007/978-981-16-0606-9
isbn_softcover978-981-16-0608-3
isbn_ebook978-981-16-0606-9Series ISSN 2199-8582 Series E-ISSN 2199-8590
issn_series 2199-8582
copyrightThe Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Singapor
The information of publication is updating

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https://doi.org/10.1057/978-1-137-52712-7pring constant, resonance frequency for different structures have been reported. Device performance parameters such as resonance frequency, displacement, electric potential and von Mises stress are obtained using FEM for single-beam, cantilever array and guided-beam-type P-VEH. Effect of shape of se
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Judy C. Woods,Stefanie S. Sebokrequency, beam displacement, stress and electric potential have been obtained and compared for both devices. A heavy pyramidal-shape seismic mass is connected at the center for higher electric potential and lower resonance frequency. A guided four-beam device can withstand higher stress and gives re
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Martinus Nijhoff Philosophy Librarysing XRD, SEM and AFM to determine the phase orientation of materials, surface morphology, topological view and surface roughness of the deposited films. A laser Doppler vibrometer has been used to determine the resonance frequency of the devices. Resonance frequency of the two-beam device comes at
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Shanky Saxena,Ritu Sharma,B. D. PantServes as a complete guide from design, FEM, and fabrication to characterization.Presents basic insights into the mask design and fabrication details.Includes 101 colored images to understand key tech
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