| 書(shū)目名稱(chēng) | DIY MEMS | | 副標(biāo)題 | Fabricating Microele | | 編輯 | Deborah Munro | | 視頻video | http://file.papertrans.cn/261/260096/260096.mp4 | | 概述 | Introduces the MEMS fabrication processes and equipment.Explains how to take the first steps - where to start and get initial advice and further assistance.Includes a global list of MEMS facilities an | | 圖書(shū)封面 |  | | 描述 | This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory?compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.? | | 出版日期 | Book 2019 | | 關(guān)鍵詞 | Actuators; Cleanrooms; DIY; Fabrication; Lithography; MEMS; MEMS Packaging; Microelectromechanical systems; | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-030-33073-6 | | isbn_softcover | 978-3-030-33075-0 | | isbn_ebook | 978-3-030-33073-6 | | copyright | Springer Nature Switzerland AG 2019 |
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