Titlebook: Building and Probing Small for Mechanics; Christian Joachim Conference proceedings 2020 The Editor(s) (if applicable) and The Author(s), u

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Differentialgleichungen erster Ordnung,given in this chapter. Moreover, we discuss the advantages of the use of focused ion beam for very specific applications, complementary to the more standard ones. Finally, we will describe, using focused He ions, how to fabricate solid state gears at the nanoscale, in the range 200?nm down to 50?nm.

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