| 期刊全稱 | Bonding in Microsystem Technology | | 影響因子2023 | Jan A. Dziuban | | 視頻video | http://file.papertrans.cn/190/189644/189644.mp4 | | 發(fā)行地址 | The first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology.Detailed description and | | 學(xué)科分類 | Springer Series in Advanced Microelectronics | | 圖書封面 |  | | 影響因子 | .Bonding in Microsystem Technology. starts with descriptions of terminology, kinds of microsystems and market analysis. Followed by the presentation of mechanisms of wet etching, set of process parameters, description of micromachining methods, examples of procedures, process flow-charts and applications of basic micromechanical structures in microsystems are shown. Next, high-temperature, low temperature and room-temperature bonding and their applications in microsystem technology are presented. The following part of the book contains the detailed description of anodic bonding, starting from analysis of properties of glasses suitable for anodic bonding, and discussion of the nature of the process. Next all types of anodic bonding and sealing procedures used in microsystem technology are presented. This part of the book finishes with examples of applications of anodic bonding in microsystem technology taken from the literature but mainly based on the author’s personal experience. . | | Pindex | Book 2006 |
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