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Submitted on: 06 November 1998. Revised on: 14 February 1999. Accepted on: 06 April 1999. ___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING

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Submitted on: 17 December 1998. Revised on: 02 March 1999. Accepted on: 30 March 1999. ___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING

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