Titlebook: Analytical Methods and Instruments for Micro- and Nanomaterials; Henry H. Radamson,Anders Hallén,Alexander Azarov Book 2023 Springer Natur

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https://doi.org/10.1007/978-3-476-03256-0ntieth century that paved the way to modern physics and our conception of matter. From fundamental research in nuclear physics, RBS developed into a very useful material characterization technique for investigation of thin film composition, depth profiling of impurities, and thickness measurement in

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https://doi.org/10.1007/978-3-476-03256-0lity for detection of low concentrations of practically any element of the periodic table with large spatial resolution. At present time SIMS is a primary tool used in both industry and research areas and also highly relevant for analysis of nano-scaled materials. However, SIMS is a quite complicate

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https://doi.org/10.1007/978-3-476-03256-0 that the main types of modern SIMS instruments are reviewed, describing the different primary ion sources and the variety of mass spectrometers for detecting secondary ions. Finally, the main operation modes of SIMS instruments are described in conjunction with examples of SIMS applications with co

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Deutsche Einheit: Ein neuer Diskurs diffraction limit, allows near-field based techniques to obtain sample information with a high spatial resolution. In this chapter basic principles, operation modes, and standard equipment for this method are discussed. Examples of applications to the nano- and micro-scale materials illustrate how