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Titlebook: Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators; Evgeni Gusev,Eric Garfunkel,Arthur Dideikin Conference

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發(fā)表于 2025-3-21 20:05:39 | 只看該作者 |倒序?yàn)g覽 |閱讀模式
期刊全稱Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
影響因子2023Evgeni Gusev,Eric Garfunkel,Arthur Dideikin
視頻videohttp://file.papertrans.cn/146/145890/145890.mp4
發(fā)行地址State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies.The subject is covered from different angles, including technology, device designs, processing aspects,
學(xué)科分類NATO Science for Peace and Security Series B: Physics and Biophysics
圖書(shū)封面Titlebook: Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators;  Evgeni Gusev,Eric Garfunkel,Arthur Dideikin Conference
影響因子A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, mat
Pindex Conference proceedings 2010
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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators978-90-481-3807-4Series ISSN 1874-6500 Series E-ISSN 1874-6535
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Evgeni Gusev,Eric Garfunkel,Arthur DideikinState-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies.The subject is covered from different angles, including technology, device designs, processing aspects,
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https://doi.org/10.1007/978-90-481-3807-4CMOS; integrated circuit; metal; microelectromechanical system (MEMS); semiconductor; sensor; static-induc
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Nanochip: A MEMS-Based Ultra-High Data Density Memory Device978-88-470-0451-1
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Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS978-1-4614-5314-7
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