標題: Titlebook: Materials & Process Integration for MEMS; Francis E. H. Tay Book 2002 Springer Science+Business Media New York 2002 X-ray.alloy.metals.pol [打印本頁] 作者: 字里行間 時間: 2025-3-21 18:37
書目名稱Materials & Process Integration for MEMS影響因子(影響力)
書目名稱Materials & Process Integration for MEMS影響因子(影響力)學科排名
書目名稱Materials & Process Integration for MEMS網(wǎng)絡公開度
書目名稱Materials & Process Integration for MEMS網(wǎng)絡公開度學科排名
書目名稱Materials & Process Integration for MEMS被引頻次
書目名稱Materials & Process Integration for MEMS被引頻次學科排名
書目名稱Materials & Process Integration for MEMS年度引用
書目名稱Materials & Process Integration for MEMS年度引用學科排名
書目名稱Materials & Process Integration for MEMS讀者反饋
書目名稱Materials & Process Integration for MEMS讀者反饋學科排名
作者: Mitigate 時間: 2025-3-21 21:13
Integration of Piezoelectric Pb(ZrxTi1-x)O3 (PZT) Thin Films into Micromachined Sensors and Actuatoon to control the bending of cantilevers as well as the stretching forces at membranes. Advanced dry etching techniques are needed for patterning the electrode films without damage to PZT, and without leaving residues. Some recent results on cantilever-microphone and piezoelectric micromachined ultrasonic transducer (pMUT) are presented.作者: Wordlist 時間: 2025-3-22 03:58 作者: BOOR 時間: 2025-3-22 08:09
Tactical Grade MEMS Gyroscopes Fabricated by the SBM Process,rsion, the measured values are 0.024./sec, ±50°/sec, and 33 Hz, respectively. The angle random walk for versions one and two are 0.0025°/ sec/√Hz and 0.0042°/sec/√Hz, respectively. These performance specifications put the SBM fabricated MEMS gyroscopes in the “tactical grade”.作者: Dignant 時間: 2025-3-22 10:17
1389-2134 academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by 作者: bypass 時間: 2025-3-22 14:52 作者: mastoid-bone 時間: 2025-3-22 20:51 作者: vitrectomy 時間: 2025-3-23 01:06 作者: Deference 時間: 2025-3-23 04:39 作者: 售穴 時間: 2025-3-23 07:20 作者: Ballerina 時間: 2025-3-23 13:07
Paul Muralt,Nicolas Ledermann,Jacek J. Baborowski,Sandrine Gentild States, where African Americans have used their citizenship rights to resist discrimination (Feagin and Sikes, 1994), in Ecuador, as in most Latin American nations, citizenship is weak and common people use strategies based on paternalism and corporatism to negotiate access to resources from which作者: 帳單 時間: 2025-3-23 17:23
A. Prochaska,S. J. N. Mitchell,H. S. Gambled States, where African Americans have used their citizenship rights to resist discrimination (Feagin and Sikes, 1994), in Ecuador, as in most Latin American nations, citizenship is weak and common people use strategies based on paternalism and corporatism to negotiate access to resources from which作者: Cytology 時間: 2025-3-23 21:42 作者: 身體萌芽 時間: 2025-3-23 23:03 作者: fibula 時間: 2025-3-24 05:24
T. L. Tan,V. A. Kudryashov,B. L. Tanhe complexes of adaptations associated with propulsion and camouflage, examined in Chapters III—VII. All those adaptations not associated with propulsion or camouflage are very different in animals belonging to different systematic groups, which is due both to differences in the initial morphologica作者: 極為憤怒 時間: 2025-3-24 07:46 作者: 母豬 時間: 2025-3-24 11:51 作者: Spinal-Tap 時間: 2025-3-24 17:22 作者: 使閉塞 時間: 2025-3-24 19:50
Arief Budiman Suriadi,Vineet Sharma,Bernhard Wieder,Gerald Mittendorferparative Education Societies community to come together to think about the significance of his life and his work for education. This book is the result of that coming together. The contributing authors reflect on what his life, the commitments he made and principally the values he took into the stru作者: Fulminate 時間: 2025-3-25 02:46
Hong Zhu,Jianmin Miao,Minoru Noda,Huaping Xu,Masanori Okuyama insights into Mandela..The book brings together, for the fiThe death of Nelson Mandela, the great South African fighter for freedom, in December 2013 prompted several colleagues within the World Council of Comparative Education Societies community to come together to think about the significance of作者: FOLLY 時間: 2025-3-25 03:41 作者: CHOIR 時間: 2025-3-25 10:40
Won Jong Yoo,Kitt Wai Kok,Say Yong Koh insights into Mandela..The book brings together, for the fiThe death of Nelson Mandela, the great South African fighter for freedom, in December 2013 prompted several colleagues within the World Council of Comparative Education Societies community to come together to think about the significance of作者: Control-Group 時間: 2025-3-25 14:12 作者: 易受刺激 時間: 2025-3-25 19:47 作者: Anthrp 時間: 2025-3-25 20:24 作者: 拋物線 時間: 2025-3-26 00:25
GaAs Cantilever and Bridge Membrane-Like Structures Fully Compatible with AlGaAs/InGaAs/GaAs and Ind microactuators. In relation to this, Gallium Arsenide (GaAs) offers a number of material-related and technological advantages over Si. This paper is an attempt to demonstrate a high potential of GaAs based heterostructures for the development of a new generation of MEMS devices. There are 1 μtm-th作者: 故意 時間: 2025-3-26 04:17 作者: 鳴叫 時間: 2025-3-26 10:19 作者: FLACK 時間: 2025-3-26 14:37
Self-Assembled Monolayers (SAM) for Tunneling Sensors,coated tip-gold sample, the results are comparable with expectations for tunneling between gold electrodes in air. Using SAM materials, the robustness of the tunnel tips in terms of reliability shows promise of improved characteristics.作者: 頭盔 時間: 2025-3-26 17:45 作者: 評論性 時間: 2025-3-27 00:54
Silicon Nanomachining by Scanning Probe Lithography and Anisotropic Wet Etching,uctor materials using a Scanning Probe Microscope (SPM). The advantages of the SPM lithography technique are its high resolution and absence of radiation damage in the substrate to be patterned. Scanning Probe Lithography (SPL) is highly dependent on tip bias, tip force, scanning speed and air humid作者: Gingivitis 時間: 2025-3-27 05:05
A Novel Bulk Micromachining Method in Gallium Arsenide,ased micro-structures using (001) GaAs substrate. For obtaining wet-etching properties with respect to crystallographic orientation, the etch rates and undercut rates of (001) GaAs are measured using various compositions of NH.OH-H.O.-H.O mixed solutions. From these experimental data, a new GaAs mic作者: 分開如此和諧 時間: 2025-3-27 07:30 作者: 奴才 時間: 2025-3-27 12:53
Spray Coating Technology of Photoresist/Polymer for 3-D Patterning and Interconnect,ection by spray technology has been studied. Specifically, the study was on the OmniSpray coating technology developed by Electronics Vision Group Austria [1,2]. Results of the present investigation confirm the superiority of the technique in comparison with the more conventional spin coating method作者: facilitate 時間: 2025-3-27 15:13 作者: 剛開始 時間: 2025-3-27 20:11 作者: A保存的 時間: 2025-3-28 00:57 作者: Connotation 時間: 2025-3-28 06:03
Magnetron Sputtered TiNiCu Shape Memory Alloy Thin Film for MEMS Applications,pon heating and cooling. Freestanding TiNiCu thin film showed clearly pronounced “two-way” shape memory effect, which is quite applicable to develop thin film micro-actuators. By depositing TiNi films on the bulk micromachined Si cantilever structures, micro-beams exhibiting good shape-memory effect作者: 名字 時間: 2025-3-28 07:06
Chemically Amplified Resist for Micromachining Using X-Ray Lithography,nce of UVIII could be optimised at the post-bake temperature of 140.C and time of 2 minutes, and x-ray exposure dose of 18 mJ/cm.. The results were confirmed by Scanning Electron Microscopic (SEM) studies on UVIII test structures, which were processed using the optimised condition. Test structure as作者: PHIL 時間: 2025-3-28 11:42
Silicon Nanomachining by Scanning Probe Lithography and Anisotropic Wet Etching,n SPM tip is around 10 nm. Samples were hydrogen-passivated by dipping in 10% aqueous HF solution for 15 sec to remove surface native oxide before performing SPM local oxidation process. Then, anisotropic wet etching process was followed with a 34 wt.% aqueous KOH solution at 40°C for 45 sec. Utiliz作者: WAX 時間: 2025-3-28 17:14
Spray Coating Technology of Photoresist/Polymer for 3-D Patterning and Interconnect,sumption for the application of intermediate layers for wafer interconnect purposes. The integrated method offers an enabling technology for patterning of extensive topography and wafer-level intermediate layer application typically required for a multitude of MEMS structures and designs, novel inte作者: Ige326 時間: 2025-3-28 22:32
Uncooled Infrared Image Sensor of Dielectric Bolometer Mode Using Ferroelectric BST Thin Film Prepaperature of BST ferroelectric film. A stress-balanced structure of multi-layered membrane has been developed in order to avoid crack and deformation in the sensor fabrication process. Temperature Coefficient of Dielectric constant (TCD) of the MOD made BST (Ba:St 75:25) thin film is about 1%/K. Unif作者: aerial 時間: 2025-3-29 01:13 作者: 大溝 時間: 2025-3-29 03:29
Book 2002l customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:a作者: Promotion 時間: 2025-3-29 08:49
rporatist processes of inclusion allow for the social mobility of the leadership of subaltern groups. However, they do not always result in the reduction of structural inequality between groups, Moreover, unlike the struggle for citizenship that is based on universalistic conceptualizations of right作者: Kidnap 時間: 2025-3-29 13:43
Paul Muralt,Nicolas Ledermann,Jacek J. Baborowski,Sandrine Gentilrporatist processes of inclusion allow for the social mobility of the leadership of subaltern groups. However, they do not always result in the reduction of structural inequality between groups, Moreover, unlike the struggle for citizenship that is based on universalistic conceptualizations of right作者: FEIGN 時間: 2025-3-29 17:04 作者: 打谷工具 時間: 2025-3-29 21:17 作者: 討人喜歡 時間: 2025-3-30 03:13 作者: 恃強凌弱 時間: 2025-3-30 06:00
T. L. Tan,V. A. Kudryashov,B. L. Tany on those basic adaptations that are important in the formation of morphological features common to all nektonic animals. Of the greatest interest in this regard are adaptations associated with the reception and transmission of information and the capture of food, which we shall examine first; alon作者: Vldl379 時間: 2025-3-30 10:25
Francis E. H. Tay,S. J. O’Shea,Andrew T. S. Wee,Poh Chong Lim,Andojo Ongkodjojo 1965a–c; 1966a,b) that for every particular type of statics there is a specific type of dynamics i.e. there are specific ways of creating vertical forces and specific means of locomotion, the types under investigation should be called statodynamics (Aleyev 1966b).作者: 悲觀 時間: 2025-3-30 16:25
K. N. Bhat,N. DasGupta,A. DasGupta,P. R. S. Rao,R. Navin Kumar,Y. Chandanay on those basic adaptations that are important in the formation of morphological features common to all nektonic animals. Of the greatest interest in this regard are adaptations associated with the reception and transmission of information and the capture of food, which we shall examine first; alon作者: cataract 時間: 2025-3-30 19:07 作者: Cryptic 時間: 2025-3-30 23:41
Dong-il Dan Cho,Sangjun Park,Jongpal Kim,Sangchul Lee,Sang Woo Leeur relationships with one another and with the material and living space which surrounds us. It is an ecological approach. As the world moves into a twenty-first century where, paradoxically, we know so much and yet appear to understand so little, and so find ourselves struggling to create social li作者: 薄荷醇 時間: 2025-3-31 02:50 作者: Lime石灰 時間: 2025-3-31 06:26 作者: Fraudulent 時間: 2025-3-31 12:56
Hong Zhu,Jianmin Miao,Minoru Noda,Huaping Xu,Masanori Okuyamas. It is an ecological approach. As the world moves into a twenty-first century where, paradoxically, we know so much and yet appear to understand so little, and so find ourselves struggling to create social li978-94-6300-908-9Series ISSN 2214-9880 Series E-ISSN 2214-9899 作者: 偽證 時間: 2025-3-31 15:41
Won Jong Yoo,Kitt Wai Kok,Say Yong Kohs. It is an ecological approach. As the world moves into a twenty-first century where, paradoxically, we know so much and yet appear to understand so little, and so find ourselves struggling to create social li978-94-6300-908-9Series ISSN 2214-9880 Series E-ISSN 2214-9899
