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標(biāo)題: Titlebook: Copper Interconnect Technology; Tapan Gupta Book 2009 Springer-Verlag New York 2009 circuit performance.copper/low-k technology.cu interco [打印本頁(yè)]

作者: TRACT    時(shí)間: 2025-3-21 16:57
書目名稱Copper Interconnect Technology影響因子(影響力)




書目名稱Copper Interconnect Technology影響因子(影響力)學(xué)科排名




書目名稱Copper Interconnect Technology網(wǎng)絡(luò)公開(kāi)度




書目名稱Copper Interconnect Technology網(wǎng)絡(luò)公開(kāi)度學(xué)科排名




書目名稱Copper Interconnect Technology被引頻次




書目名稱Copper Interconnect Technology被引頻次學(xué)科排名




書目名稱Copper Interconnect Technology年度引用




書目名稱Copper Interconnect Technology年度引用學(xué)科排名




書目名稱Copper Interconnect Technology讀者反饋




書目名稱Copper Interconnect Technology讀者反饋學(xué)科排名





作者: 貧困    時(shí)間: 2025-3-21 21:08

作者: FIG    時(shí)間: 2025-3-22 03:29
978-1-4899-8511-8Springer-Verlag New York 2009
作者: Dysarthria    時(shí)間: 2025-3-22 06:57
Diffusion and Barrier Layers,stals [1] for the formation of ., ., and . regions. The performance of the devices depends critically on the impuri-ty concentration and the impurity profile. For this reason the . in semiconductors has been studied extensively.
作者: 摻和    時(shí)間: 2025-3-22 12:25

作者: BIBLE    時(shí)間: 2025-3-22 13:17

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作者: 玩忽職守    時(shí)間: 2025-3-22 22:48
Coping and Living with Cervical Cancer,n sub-100 nm devices. With rapidly . and more demand for circuit ., low-. and passivation materials have been inserted with Cu-interconnects to address the additional . reduction [.–.]. Unfortunately, as the thickness of the gate oxide becomes very thin because of the scaling down of channel length,
作者: 現(xiàn)存    時(shí)間: 2025-3-23 02:57
Coping and Living with Cervical Cancer,stals [1] for the formation of ., ., and . regions. The performance of the devices depends critically on the impuri-ty concentration and the impurity profile. For this reason the . in semiconductors has been studied extensively.
作者: FLIRT    時(shí)間: 2025-3-23 05:37
Coping and Living with Cervical Cancer,on the deposited dielectric layer is the usual practice in damascene (single/dual) architecture. The main driver behind this is advanced .. In an effort to keep up the trend of reduction in feature size, semiconductor industries have switched over from conventional ultraviolet (UV) to deep ultraviol
作者: Obstacle    時(shí)間: 2025-3-23 09:54
Coping and Living with Cervical Cancer,, better performance of the scaled circuits, and thinner gate material need better dielectric materials other than silicon dioxide (SiO.). As a result, copper has replaced Al-interconnect and low. interlayer and high. gate dielectric materials have replaced SiO.. Deep submicron copper interconnects
作者: 子女    時(shí)間: 2025-3-23 15:13

作者: Arbitrary    時(shí)間: 2025-3-23 21:56
TVET and Ecologism: Charting New Terrained capacitive reactance of the interconnecting lines. The conductivity of copper (σ. = 0.598 ohm-cm and σ . = 0.374 ohm-cm) is higher and it offers higher resistance to electromigration (EM) compared to aluminum (or Al-alloy). At the same time, copper has the advantage of making finer wires with low
作者: anatomical    時(shí)間: 2025-3-24 00:20

作者: Connotation    時(shí)間: 2025-3-24 04:48
Coping and Living with Cervical Cancer,s the additional . reduction [.–.]. Unfortunately, as the thickness of the gate oxide becomes very thin because of the scaling down of channel length, quantum mechanical . occurs for voltages below the Si/SiO. barrier height which is approximately 3.1 eV [.–.] (.).
作者: 衣服    時(shí)間: 2025-3-24 07:04
Book 2009on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology. Because metallic conductivity and resi
作者: nocturia    時(shí)間: 2025-3-24 14:41
Introduction,c material) to separate the .. Besides being an insulating material for interconnecting lines, SiO. has been used also as a gate material in metal oxide semiconductor (MOS) devices. As a matter of fact, Al coupled with SiO. has become the workhorse of IC technology.
作者: 引水渠    時(shí)間: 2025-3-24 15:17
Pattern Generation,et (DUV) lithography. Figure 4.1 shows a picture of the trenches produced by using DUV resist and phase-shift mask (PSM). The resist images show a .. factor as small as 0.25 (the 2004 ITRS requirement for technology node is . and is expected to be . by the year 2007, where .).
作者: adroit    時(shí)間: 2025-3-24 19:48
The Copper Damascene Process and Chemical Mechanical Polishing,process of decorating a metal with wavy patterns of gold or silver. However, in integrated circuits (ICs) the . means an elegant technique of inlaying metal (copper) for interconnect which avoids the complicated process of metal etching.
作者: GUILT    時(shí)間: 2025-3-25 01:11

作者: 不朽中國(guó)    時(shí)間: 2025-3-25 06:11

作者: 假裝是你    時(shí)間: 2025-3-25 10:15
Coping and Living with Cervical Cancer,c material) to separate the .. Besides being an insulating material for interconnecting lines, SiO. has been used also as a gate material in metal oxide semiconductor (MOS) devices. As a matter of fact, Al coupled with SiO. has become the workhorse of IC technology.
作者: 預(yù)示    時(shí)間: 2025-3-25 13:34
Coping and Living with Cervical Cancer,et (DUV) lithography. Figure 4.1 shows a picture of the trenches produced by using DUV resist and phase-shift mask (PSM). The resist images show a .. factor as small as 0.25 (the 2004 ITRS requirement for technology node is . and is expected to be . by the year 2007, where .).
作者: mighty    時(shí)間: 2025-3-25 16:58

作者: 折磨    時(shí)間: 2025-3-25 21:08

作者: PAC    時(shí)間: 2025-3-26 02:50
Coping and Living with Cervical Cancer, Cu is difficult and photoresist work cannot withstand the temperatures required for Cu-etching (>200?oC). Moreover, wet etching and lift-off techniques of Cu have been attempted without much success. So a new process technology known as the . process has been introduced to integrate Cu-interconnects in modern integrated circuits (ICs).
作者: 凹槽    時(shí)間: 2025-3-26 04:38

作者: obviate    時(shí)間: 2025-3-26 09:31

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作者: Mettle    時(shí)間: 2025-3-26 20:28

作者: concubine    時(shí)間: 2025-3-27 00:33
Dielectric Materials,n sub-100 nm devices. With rapidly . and more demand for circuit ., low-. and passivation materials have been inserted with Cu-interconnects to address the additional . reduction [.–.]. Unfortunately, as the thickness of the gate oxide becomes very thin because of the scaling down of channel length,
作者: FEAT    時(shí)間: 2025-3-27 03:17

作者: CRAMP    時(shí)間: 2025-3-27 08:19

作者: Commodious    時(shí)間: 2025-3-27 11:02

作者: persistence    時(shí)間: 2025-3-27 14:38
The Copper Damascene Process and Chemical Mechanical Polishing, in Damascus, a city notable for manufacturing and shipment of damascened steel sword blades, which were exceptionally hard and resilient. In French, damascene is . means to decorate in the manner of Damascus blades or steel from Damasquine of Damascus. Thus the word . can be taken literally as the
作者: CRP743    時(shí)間: 2025-3-27 20:41
Conduction and Electromigration,ed capacitive reactance of the interconnecting lines. The conductivity of copper (σ. = 0.598 ohm-cm and σ . = 0.374 ohm-cm) is higher and it offers higher resistance to electromigration (EM) compared to aluminum (or Al-alloy). At the same time, copper has the advantage of making finer wires with low
作者: graphy    時(shí)間: 2025-3-27 22:08
Book 1970actors have contributed to this: 1) the dissemination of more accurate information about the surgical anatomy of the intrin- sic and extrinsic hepatic circulatory systems, which has acquainted surgeons with the principles and techniques of hemostasis essential for successful operative intervention o
作者: 金桌活畫面    時(shí)間: 2025-3-28 03:12
Risiken und Chancen,en wie auch die Risiken entsprechender Techniken ergeben sich nicht allgemein aus der Technik, sondern müssen stets vor dem Hintergrund der geplanten Verwendung eines Systems gesehen werden. Daher werden die Chancen und Risiken nur allgemein beschrieben, wobei die Nutzung der Technik im Krisen- und Infrastrukturmanagement den Fokus bilden soll.
作者: 教育學(xué)    時(shí)間: 2025-3-28 10:04
e surgeries of the world renowned Skull Base Institute.IncluI am honored to be asked to write a foreword to this comprehensive and fascinating book on skull base surgery (SBS) by Dr. Shahinian, who I consider among the pioneers in the field. I should start by writing a disclaimer. I first met Dr. Sh
作者: COWER    時(shí)間: 2025-3-28 10:52
erschienen sind. Der Verlag stellt mit diesem Archiv Quellen für die historische wie auch die disziplingeschichtliche Forschung zur Verfügung, die jeweils im historischen Kontext betrachtet werden müssen. Dieser Titel erschien in der Zeit vor 1945 und wird daher in seiner zeittypischen politisch-ide




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